EUVA Programs
Overview of EUVL R&D in Japan
R&D Scheme
Construction of LPP EUV Light Source of 4W Output Power
Construction of DPP EUV Light Source System 4W Output Power
EUV Absolute Wave Front Measurement system
University of Hyogo
Target
Complete EUV prototype exposure machine in 2006(Production model will be made in 2010)
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