EUVA Programs
Overview of EUVL R&D in Japan
R&D Scheme
Construction of LPP EUV Light Source of 4W Output Power
Construction of LA-DPP Power Budget Analysis Estimation at the power of 180W@IF
EUV Absolute Wave Front Measurement system
University of Hyogo
Target
Complete EUV prototype exposure machine in 2006（Production model will be made in 2010)
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