Program
[講演トピックス]
| - Exposure Tools |  |
(ET) |
| - Source | (SO) | |
| - Mask | (MA) | |
| - Defect Inspection | (DI) | |
| - Reticle Protection | (RP) | |
| - Metrology | (ME) | |
| - Sensors & Diagnostics | (SD) | |
| - Multilayer Coatings | (MC) | |
| - Contamination & Cleanliness | (CC) | |
| - Optics | (OP) | |
| - Resist | (RE) | |
| - Cost of Ownership | (CO) |
AGENDA
| Sunday, 28 October | ||
| 16:00 - 20:30 | Early Registration and Speaker Prep | |
| 18:00 - 20:00 | Welcome Reception [札幌コンベンションセンター中ホールにて(サキソフォン ソロ)] |
|
| 19:00 - 21:00 | EUVL Steering Committee Dinner Meeting (invitation only) | |
| Monday, 29 October | ||
| 07:30 - 13:00 | Poster Setup | |
| 08:30 - 12:30 | General Session Keynote speech I ：東芝セミコンダクター社 社長 齋藤昇三 氏 ｢Toshiba's Strategy in Semiconductor Business and Production Technology｣ |
|
| 12:30 - 13:30 | Lunch | |
| 13:30 - 17:00 | General Session | |
| 17:00 - 18:30 | Poster Session | |
| 19:00 - 21:00 | EUVL Symposium Welcome Dinner [ルネッサンスサッポロホテルにて(バイオリン＆アコーディオン デュオ)] |
|
| Tuesday, 30 October | ||
| 08:30 - 12:40 | General Session Keynote speech II ：日立製作所 中央研究所 主管研究員 岡崎信次 氏 ｢EUV Lithography: Issues and Future Prospects｣ |
|
| 12:40 - 13:40 | Lunch | |
| 13:40 - 15:00 | Poster Session | |
| 15:00 - 17:00 | Posters Removed (all posters must be removed by 17:00) | |
| Wednesday, 31 October | ||
| 07:00 - 08:00 | EUVL Steering Committee Breakfast Meeting (Invitation only) | |
| 08:30 - 12:30 | General Session | |
| 12:30 - 13:30 | Lunch | |
| 13:30 - 17:40 | General Session | |
| 18:30 - 20:30 | Casual Dinner [サッポロビール園にて(ジャズピアノ/パーカッションバンド)] |
|
※ アジェンダの詳細は、以下のSEMATECH Webにてご確認下さい。 http://www.sematech.org/meetings/announcements/8059/program.htm |
||
| The following meetings will be held in conjunction with the EUVL Symposium. Note that a separate registration form is required for each meeting. Announcements for these meetings will go out at a later date: | ||
| Thursday, 1 November | ||
|
IEUVI Mask TWG (Invitation Only) IEUVI Resist TWG (Invitation Only) IEUVI Source TWG (Invitation Only) IEUVI Optics Lifetime/Contamination TWG (Invitation Only) |
||
| Friday, 2 November | ||
| IEUVI Meeting (Invitation Only) | ||
